二维集成相移剪切干涉法及其在亚纳米级波像差检测系统中的应用研究

As nano-technology such as extremely large scale integrated circuit lithography (ELSIC) have been advancing rapidly, existing optical systems including photolithographic optics have reached the incredible resolution of 20~50 nm which is obviously not the end of the market demand,and yet we have to pursue the further improvement of the crucially important wavefront monitoring and control by preconditioning the measurement precision of wavefront aberration to the ever higher level. As a matter of fact, this project is planned to tackle the well known aberration measurement accuracy issue, aimed at the future need accuracy, by establishing a new method that has an optical system integrating new hybrid pinhole array gratings for incident, 2D checkboard gratings for shearing, stepping type of phase shift and relevant aerial phase vector solving. As phase gratings has been inserted into the object and image planes of the system-to-be-measured, the optical filling becomes multi-directional and absolutely full, the shearing is multiple directional and with more dimensions, so the wanted aberration measurement goes down to the pupil substantially locally and of cause with higher resolution as a whole. The system will also introduce prixel-independent intensity modulation and optimized phase stepping to further increase the precision and speed of phase modulation and aberration quantification.

随着纳米技术包括极大规模集成电路制造技术的快速发展，现有光学应用系统如光刻机和显微系统等的解析度（20~50nm）已经不能满足需要，对系统物镜的波前进行精确调控是进一步提高上述光学系统精度的关键环节之一，而对波像差的精确测量是波前调控的必要前提。本课题围绕如何提高波前偏差检测精度这个国内外精密光学系统所面临的普遍问题，提出利用复合入射光栅、二维衍射剪切光栅、步进相移与空间相差矢量解析技术来实现集成化波像差测量。这一方法在被测光学系统的物面和像面都设置光栅进行波前复制，可使光填充具有充实与多向性，剪切具有多向与多维的特征，因而有望提高出瞳中局部和总体波像差的测量精度。同时，像素独立的光强模式化和优化的相差步进模式等能更精确、快捷地对相差乃至波像差求解。

随着纳米技术包括极大规模集成电路制造技术的快速发展，现有光学应用系统如光刻机和显微系统等的解析度（20~50nm）已经不能满足需要，对系统物镜的波前进行精确调控是进一步提高上述光学系统精度的关键环节之一，而对波像差的精确测量是波前调控的必要前提。本课题围绕如何提高波前偏差检测精度这个国内外精密光学系统所面临的普遍问题，提出利用复合入射光栅、二维衍射剪切光栅、步进相移与空间相差矢量解析技术来实现集成化波像差测量。这一方法在被测光学系统的物面和像面都设置光栅进行波前复制，可使光填充具有充实与多向性，剪切具有多向与多维的特征，可提高出瞳中局部和总体波像差的测量精度。同时，像素独立的光强模式化和优化的相差步进模式等能更精确、快捷地对相差乃至波像差求解。