基于高Q值Fabry-perot共振敏感机制的全固态超宽频带高灵敏声传感器件的基础研究

Broadband high sensitive acoustic sensor is the inevitable demand of industrial development in the future, traditional acoustic sensor devices using diaphragm as sensitive structure which is restricted by the moving parts, has bottleneck problem of narrow bandwidth and low sensitivity in acoustic detection, a new method to explore the all-optical acoustic sensor devices, has become the focus of wide research at home and abroad. This project is put forward based on solid-state ultra wide band high sensitive acoustic sensors of the high Q Fabry-perot resonance sensitive mechanism, focus on key scientific issues, like that the sensitive mechanism of Fabry-perot resonant cavity sound pressure, solid-state Fabry-perot resonant cavity structure mechanics parameters characteristics, noise coupling characteristics of broadband high sensitive acoustic sensor, the key to solve structure parameters matching design of broadband high sensitivity acoustic sensitivity Fabry-perot resonant cavity, the MEMS integration of the whole packaging technology of Fabry-perot resonant cavity, key technology of weak signal detection, envir- onmental adaptability of broadband high sensitive Fabry-perot sound sensitive unit and other key technologies, a new model transform of the traditional "sound-mechanical-pressure (light) - power" to "sound-light-electricity detection is achieved, laying the foundation for achieveing the ultra wide band, high sensitive acoustic sensors devices of integration and bulk.

宽频带高灵敏的声传感器件是未来工业发展中的必然需求，以振膜为敏感结构的传统声传感器件受运动部件的限制，存在有声探测频带窄、灵敏度低的瓶颈问题，探索纯光学的声传感器件的新方法，成为国内外广为研究的热点。本项目提出基于高Q值Fabry-perot共振敏感机制的全固态超宽频带高灵敏声传感器件，围绕Fabry-perot共振腔声压敏感机理、全固态Fabry-perot共振腔结构力学参数特性、宽频带高灵敏度声传感器噪声耦合特征等关键科学问题，重点解决宽频带高灵敏度声敏感Fabry-perot共振腔的结构参数匹配设计、Fabry-perot共振腔MEMS一体化全封装技术、极微弱信号检测关键技术及宽频带高灵敏Fabry-perot声敏感单元的环境适应性等关键技术，实现传统“声-机械-压（光）-电”到“声-光-电”声探测新模式的转变，为实现集成化、批量化的超宽频带、高灵敏声传感器件奠定基础。

超宽频带高灵敏度声传感器件广泛应用于光声成像，无损检测，工业过程控制，高压电晕噪声检测等工业发展领域。以振膜为敏感结构的传统声传感器件受运动部件的限制，存在声探测频带窄、灵敏度低的瓶颈问题，探索高Q值超宽频带高灵敏声传感器成为国内外广为研究的热点。本项目提出了基于高Q值Fabry-Perot共振敏感机制的全固态超宽频带高灵敏声传感器件，围绕声压致介质密度改变的宽频带声信号检测机理研究，全固态高Q值Fabry-Perot共振腔MEMS制造工艺及封装方法，宽频带高灵敏度声传感器噪声耦合特征等关键科学问题。重点解决了超宽频带高灵敏度声敏感Fabry-Perot共振腔的结构参数匹配设计、Fabry-Perot共振腔MEMS一体化全封装技术、极微弱信号检测关键技术及宽频带高灵敏Fabry-Perot声敏感单元的环境适应性等关键技术，实现了频率响应范围为20Hz-1.4MHz，最小可探测声压为40.9dB@1kHz的关键技术指标。实现了传统“声-机械压（光）-电”到“声-光-电”声探测新模式的转变，为实现集成化、批量化的超宽频带、高灵敏声传感器件生产奠定基础。