PLZT构型组合下的光电-静电复合驱动机理及其光控伺服特性研究

The micro-driven based on the photomechanical materials has the advantages of clean driving and remote control which makes it have promising applications in micro-electro-mechanical system and micro-opto-electro-mechanical systems. To solve the problem of slow response of driven with photodeformation of PLZT, an opto-electrostatic hybrid driving mechanism is proposed based on PLZT ceramics and the characteristics of optical control servo is studied in this project. Based on the study of mechanism of photo-induced electric field, influence factors analysis and regulation measures of bias energy field, the mathematical model of photo-induced electric field with multi-field coupling is established. Based on the photoelectric converter with combination configurations of PLZT, the opto-electrostatic hybrid driving mechanism is revealed and the mathematical model of opto-electrostatic hybrid driven with different loads coordinately illuminated by multiple light sources is established. The dimensions and load matching of photoelectric converter are optimized. The energy transfer efficiency of photoelectric converter is analyzed. Hence, the driving performance of opto-electrostatic hybrid driven can be improved. The close-loop optical control servo system with opto-electrostatic hybrid driving mechanism is set up. The characteristics of optical control servo and control strategy are studied by use of simulation and experiment methods. The research in this project can provide a novel choice for the optical micro-driven and lay the foundation for the engineering application of opto-electrostatic hybrid driving mechanism.

基于光致机械响应材料的微驱动具有驱动清洁和远程可控等优点，使其在微机电系统及微光机电系统领域具有良好的应用前景。本项目针对PLZT陶瓷光致形变驱动响应速度较慢的问题，提出一种基于PLZT陶瓷的光电-静电复合驱动机理，并对其光控伺服特性进行研究。通过对PLZT陶瓷光致电场作用机理及其影响因素分析和偏置能场调控措施的研究，构建多场耦合下的光致电场数学模型；基于PLZT陶瓷构型组合下的光电换能器，揭示光电-静电复合驱动机理，并构建不同类型负载在多光源协调激励下的光电-静电复合驱动数学模型；对光电换能器进行尺寸及负载匹配优化，并进行光电能量传递效率分析，提升光电-静电复合驱动性能；搭建PLZT陶瓷光电-静电复合驱动的闭环光控伺服系统，利用仿真与实验相结合方法开展光控伺服特性及控制策略研究。本项目的研究为光控微驱动形式提供了一种新的选择；并为光电-静电复合驱动机理的工程应用奠定基础。

基于光致机械响应材料的微驱动具有驱动清洁和远程可控等优点，使其在微机电系统及微光机电系统领域具有良好的应用前景。本项目针对PLZT陶瓷光致形变驱动响应速度较慢的问题，提出了一种基于PLZT陶瓷的光电-静电复合驱动机理，并对其光控伺服特性进行研究。通过对PLZT陶瓷光致电场作用机理及其影响因素分析和偏置能场调控措施的研究，构建了多场耦合下的光致电场数学模型；揭示了光电-静电复合驱动机理，并构建了不同类型负载下的光电-静电复合驱动数学模型；基于所构建的光电-静电扭转驱动数学模型，对PLZT陶瓷以及静电负载的尺寸、铜箔不同的位置等因素对光电-静电扭转驱动性能的影响进行了理论及实验分析；搭建了PLZT陶瓷光电-静电复合驱动的闭环光控伺服系统，分别以光电-静电扭转驱动器的驱动电压和输出位移为控制对象，利用仿真与实验相结合方法开展了闭环控制策略的原理性研究。本项目的研究为光控微驱动形式提供了一种新的选择；并为光电-静电复合驱动机理的工程应用奠定基础。