微型可编程相位光栅技术的原理与实验研究

The programmable phase grating is now playing a more important part than general grating in many fields. A new type of Programmable Phase Grating based on MOEMS is developed in this project. With this kind of programmable phase grating, the equivalent optical parameter can be controlled by program. The project mainly includes three aspects: (1) the research of the principle of the novel programmable phase grating, the establishment and investigation of the theoretical model; (2) the design of the grating structure, the arrangement of the micro-machining processes, and the fabrication of the grating prototype; (3) the establishment of the principle experiments device, the accomplishment of the test experiments, the analysis and investigation of experiments results and the verification of the theoretical model of the programmable phase grating. Such kind of research will provide the research on novel MOEMS such as micro integrated spectrograph with experience, and afford substantial theoretical reliance and a considerable of experimental data helpful to the future application of this kind of technology. There are totally nine parts of contents in this report, in which detailed and complete processes and achievements of the research based on the project have been introduced. The main contents of the project plan have been accomplished and the expected goal has been achieved. .First, the research work on the theoretical model is introduced in this report. A kind of programmable phase grating technology based on micro/nano technology is presented, namely to realize the continuous programmable control of the main optic parameters of grating by MOEM technology. As the reliance and basis of the whole design of the grating system, the theoretical model of optical characteristics is established, the accuracy and feasibility of which have been demonstrated by the simulation results using the programmed software. The theoretical model of the grating structure is also established. The corresponding software is programmed to analyze deformation of the movable ribbons of the programmable grating driven and controlled by electrostatic attraction. All these analysis results can provide important principle for the micro-machining process design and the fabrication of the grating. The gratings have been fabricated by the surface micro-machining technology according to the processes. This set of processes is designed to be applicable to the fabrication of the grating as well as the fabrication of comparable general micro-mechanical structures, representing almost the highest level of the internal multi-layer surface micro-machining technology. The control and test electronics are established as the external hardware to guarantee the test and control of the grating system and have been simulated by the circuit emulator. The complete experiment system is also built up. The performance and behavior of the grating system have been tested and a great deal of data has been gain through different kinds of experiments..Second, the research work on the micro-machining processes and the prototype system of the MEMS-based Programmable Phase Grating are presented in this report. According to the internal technology conditions two different sets of micro-machining processes are designed and compared. Twice fabrications have been performed successively with the better set of processes and some prototypes of the programmable phase grating have been achieved. There are relatively much less defects in the products of the second fabrication because of the improved processes. Some gratings with good quality have been bonded and packaged. .Finally, the research work on the principle experiments is presented in this report. The behavior and performance of the prototype system of Programmable Phase Grating have been tested. The test results include that the movable ribbons of the grating can be driven by the voltage within 50V, and the activation time is approximately less than 70ms, and the resonance frequency exceeds 120~240Hz, the cut-off frequency is 7.14KH

提出一种新颖的微型可编程相位光栅技术的研究。建立该光栅技术的理论结构模型和控制模型，并用计算机仿真实验的结果验证该模型；研制出可编程相位光栅样机；建立相应的原理性实验装置；对该光栅样机的光谱分析等光学行为特性进行原理性实验研究，为新型微光机电系统如微型集成光谱仪的研究提供经验。该光栅技术可望在许多高新技术领域获得应用。