单根精度纳米线的高柔性与大规模操控技术研究

Based on previous research work for low-cost and high-throughput manipulation of micro/nano particles by light-induced dielectrophoresis, applicants will conduct research on basic theory, experimental analysis and system integration of massively parallel manipulation and assembly of nanowires. A micro system platform applicable to precisely manipulate or flexibly assemble either single or multiple nanowies will be built, which will rapidly and significantly promote the assembly technology in nano-scale manufacturing. The main research contents are described as follows: Firstly, by analyzing the variety of physical fields coupling affecting the manipulating process of nanowires in the chip, dielectric response mechanism and combined dielectrophoresis potential distribution model of one-dimentional nanostructures would be studied. Subsequently, a dynamic model would be established to simulate the motion behavior of nanowires during the manipulation and assembly. On that basis, the core components of nanowire-manipulating platform, assembling chip, would be designed and manufactured, including layout design, material selection and the fabrication process of photoconductive layer, microfluidic channel and geometry of the virtual and solid electrode arrays. After that, combining reconfigurable virtual electrode pattern direct-writing subsystem, real-time vision detection and tracking subsystem, signal excitation and control subsystem, and microfluidics control subsystem, a low-cost, flexible and high-precision micro system platform for nanowire manipulation and assembly would be integrated.

基于申请者前期在应用光诱导介电泳技术实现微纳米粒子低成本、高通量操纵的研究成果和工作基础，开展面向纳米线的精确操纵和柔性组装的基础理论、实验分析和系统集成研究，从而建立一套同时满足单根精确操纵和多根批量组装的高柔性纳米线精确操控系统平台，使纳米尺度制造中的组装技术研究获得跨越式发展。主要研究内容涉及：从分析影响纳米线操控的多种物理场耦合作用入手，进行纳米线在复合式介电泳作用下响应机理的研究，并对纳米线操控过程进行动力学建模和计算仿真。在此基础上，进行纳米线操控平台的核心部件- -精确操控芯片的设计制造，涉及虚拟电极阵列和实体电极阵列的版图设计、光电导层、微流体通道的选材及其制作工艺研究。最后，组合光虚拟电极直写子系统、实时监控子系统、激励信号控制子系统、微流体控制子系统和计算中心，构成整个纳米线高柔性精确操控系统平台。

本项目系统研究了单根精度纳米线的高柔性与大规模操控技术，为研究纳米传感器、纳米机器人（定点运送药物或者放射性种子）以及精确的纳米手术（清洁堵塞动脉）奠定了重要基础，具体研究成果可概括如下：（1）研究建立了纳米线的介电泳动力学模型并进行了介电泳操控过程的电动力学数值仿真。通过系统分析纳米线在交流动电环境下的受力状况，讨论了影响纳米线介电泳操控的相关因素。（2）研制出一套集成纳米线精确操控芯片、光虚拟电极直写子系统、纳米线实时监控子系统、激励信号控制子系统、微流体控制子系统及计算控制中心为一体的纳米线精确操控系统平台，同时实现对单根纳米线的动态捕捉、精确定位、可控取向、线性输运以及多根纳米线的合并组合、并行操控、动态组装等多种低成本、柔性化操纵功能。（3）研制了无引线点阵电极介电泳芯片，研究了其特性并进行了单根精度纳米线操控组装实验。本研究中芯片的制备工艺研究涉及：实体电极阵列的结构设计及制备工艺；流道层和穿透电极层的制备工艺与无引线点阵电极介电泳芯片的封装测试。（4）研究了基于分片式介电泳芯片的纳米线操控与组装，具体为：交流电信号的电压幅值和频率以及PET薄膜厚度对纳米线组装的影响、纳米线阵列和网格组装。（5）研究了光致电渗流操控纳米线，包括流场分析、纳米线的定点沉积、水平迁移与图案化组装。