基于原位生长与纳米操纵复合的碳纳米管互联接触机理与调控方法

Nanostructures such as carbon nanotubes(CNTs), nanowires and graphene are being intensively explored for future electronic, photonic, and energy applications. In order for these nanosystems to progress from the research laboratory to technology, it is critical to precisely understand and control nanocontacts between CNTs and metal electrodes. The proposal focuses on the mechanism of interactions between CNTs and metals under nano scale. We will propose a new model of nanocontact in terms of interface constructure and behavior and evaluate the mechanical and electrical properties of nanocontact between in-situ CNTs and metals. By self-directed liquid infiltration of in-sity vertical CNTs, we could demonstrate the fabrication of horizontally and densely aligned CNTs due to capillary forces. We will also present a new method of nano connect and assembly for high throughout using high precisely micro/nano manipulation platform. Based on these technologies, we will demonstrate a prototype of carbon nanotube device which works on conductive substrate. In all, the proposal takes advantages of the combination of top-down and bottom-up nanfabrication approaches to develop a new concept and method for mass production and assembly of future nano devices.

碳纳米管等纳米结构材料在电子、光学和能源等领域有着广泛应用的前景，为实现纳米器件或系统从研究室走向实际应用，还需解决批量化制造、器件性能的稳定性等关键问题。本项目聚焦碳纳米管与金属电极互联中的科学问题，重点研究纳米尺度下碳纳米管与金属原子的界面接触机理，从界面结构-行为角度建立跨尺度纳米接触模型，评价原位生长的碳纳米管端面与金属接触的力学和电学特性；利用毛细管作用原理，实现碳纳米管束的致密化，并解决原位生长状态下使垂直碳纳米管束定向水平屈曲的问题；结合微纳精密定位操作技术，提出针对大规模阵列碳纳米管器件的纳米互联与装配新方法，构建基于导电基底上生长的碳纳米管器件原型。本项目采取"自上而下"与"自下而上"相结合的纳米制造方式，在碳纳米管及器件的大规模批量化生长、互联和装配制造方面具有基础性和启发性作用，为纳米加工、微纳操作与装配提供了新思路与新方法。

纳机电系统已经成为微纳领域近年来发展最快的研究方向。纳米管阵列是由多根碳纳米管定向平行排列形成的碳纳米管宏观体。用碳纳米管阵列有望突破常规器件的性能极限，实现具有新原理或高性能的纳米器件和系统。本项目主要在以下方面取得了突破：1）针对原位生长的碳纳米管阵列，结合AFM技术，分析了在纳米操作过程中与金属接触的机理，为纳米器件的操作提供了理论基础；2）基于毛细作用力，提出了碳纳米管束的致密化和定向调控方法；3）构建了纳米蘸笔直写（FPN）平台，分析了FPN的机理，实现了纳米线的直写，为其在碳纳米管互联中的应用奠定基础；4）采用水辅助CVD法，实现了碳纳米管阵列批量化图案化制备，为大批量碳纳米管器件的加工提供了良好的方法。这些研究成果将对相关领域的发展起到了一定的推动作用。