柔性超声换能器及其力电耦合机理

Ultrasonic imaging is an important technology for health monitoring and disease diagnosis and treatment. This project focus on realization of the flexible and stretchable ultrasonic transducer based on piezoelectric ceramics, and demonstration of large area comfortable ultrasonic imaging with high accuracy in real time, by integrating the device with human skin in a conformal way. The key point as well as the challenge lies in the stretchable structure design and fabrication to turn the hard and fragile piezoelectric ceramics material into flexible and stretchable device without any performance degradation when working in flexible and easy-deforming environment. Here, serpentine interconnection and transfer printing technology is proposed to realize flexible and stretchable ultrasonic transducer based on piezoelectric ceramics; corresponding theoretical model is ought to be established to describe the mechanism of ultrasonic imaging in flexible environment with relative experiments to evaluate which.

超声成像是人体健康监测、疾病诊断与治疗的重要手段。本课题研究基于压电陶瓷的柔性可延展超声换能器的制备，以及利用该器件与人体皮肤表面完美贴合，在待测处实现高精度、大面积、实时、舒适的超声成像。研究重点与难点在于电子器件可延展结构设计以及相应的微纳制备技术的开发以实现将传统硬而脆的压电陶瓷材料制备成可弯曲可拉伸且性能不受变形影响的柔性超声换能器。本课题拟通过蛇形导线设计与转印技术实现基于压电陶瓷的柔性可延展超声换能器，建立柔性环境对超声成像影响的理论模型，并进行实验验证。

超声成像是人体健康监测、疾病诊断与治疗的重要手段。本项目以实现人体可穿戴的超声换能器阵列为研究目标，开展基于压电陶瓷的柔性可延展超声换能器的设计与制备技术研究，分析柔性环境下超声换能器的变形特性。项目通过可延展蛇形互连导线结构设计了基于微米厚度压电薄膜的柔性超声换能器阵列，发展了基于微纳制备工艺和印章转印的制备方法，实现柔性超声换能器原理器件。针对器件制备成功率低的问题，总结分析了材料、制备工艺的主要原因，揭示转印过程中印章剥离速度和印章变形对转印效果的影响机理，并提出了基于厚块状压电陶瓷的上下互连电极非共面结构的超声换能器修正设计方案。