面向光子集成的光子晶体结构硅/电光聚合物低功耗高速电光调制器研究

With the high-speed development of the information society and much increase of the demand for the information technology, it is become more and more important to develop a new information technology by using photonic integration technology. High-speed and low-consumption optical modulator is an key device for that new information technology. Basing on the structure of a photonic crystal resonant cavity, we will investigate a low consumption and high-speed optical modulator hybrid of silicon and electro-optical material. Utilizing the enhancement of mode field by slow-light effect in the photonic crystal waveguide, high-Q factor and small volume cavity, slot cavity, combining the large nonlinear coefficient and ultra-fast response of the electro-optical material, to realize the characterization of the optical modulator of high-speed and low consumption; to study and resolve key physical problem and the technology difficulty of the balance between the high-speed and low consumption of the modulation of the photonic crystal cavity; to study the fabrication technology and method, the characterization method, the effective combination method between the silicon photonic crystal and the electro-optical material, and the integration method of the hybrid electro-optical modulator. At last, to realize the hybrid optical modulator by using the silicon photonic crystal waveguide-cavity slot and electro-optical material with modulation speed of 40 Gbps and power dissipation of 10 fJ/bit. It will realize the Complementary advantages of the silicon semiconductor and electro-optical polymer materials, and it is significant to promote the development of our new-age optical network and information technology.

随着信息化社会高速发展对信息技术日益增长的需求，发展新一代以光子集成为基础的信息技术变得越来越重要。高速、低功耗的光调制器是这种新一代信息技术的关键器件。我们将基于光子晶体共振微腔结构，研究由硅和电光聚合物混合型低功耗、高速率电光调制器。研究利用硅基光子晶体波导慢光速、高Q值、小模体积微腔、微腔狭槽的模场增强效应，结合电光聚合物的大非线性系数和超快时间响应等特性实现低功耗和高速率性能；研究解决微腔模调制器低功耗和高调制速率二者平衡的关键物理问题和技术难点，研究硅/聚合物混合材料构成的调制器的制作工艺和方法，硅微结构与电光聚合物的有效结合方法，混合型电光调制器表征方法及其光子集成方法，实现硅基光子晶体狭槽微腔/电光聚合物的调制速率40 Gbps、功耗10 fJ/bit的电光调制器。本项目将实现半导体材料和聚合物材料的优势互补光调制器，将为推动我国新一代光网络和信息技术的发展具有重要意义。

随着信息化社会高速发展对信息技术日益增长的需求，发展新一代以光子集成为基础的信息技术变得越来越重要。高速、低功耗的光调制器是这种新一代信息技术的关键器件。我们设计了光子晶体结构聚合物电光调制器，创新设计了SU8/LN光子晶体平板电光调制器，创新提出采用超快瞬态响应的胶体量子点作为探针、基于泵浦-探测方法探测微纳结构材料的超快响应时间。分别研究采用全息曝光方法、紫外光刻方法和电子束曝光方法制作光子晶体，测试了SOI平板光子晶体、光子晶体波导、微腔光谱特性。设计了易于加工的具有连续域束缚态的大晶格常数光子晶体并应用于光子晶体-电光聚合物调制器，基于CMOS工艺兼容的硅光工艺制作了光子晶体平板结合电光聚合物的混合型电光调制器，在合适模式Q值下调制器的驱动电压小于1V。基于SOI微环调制器实现了模式调控，基于合适Q值的SOI微环-电光聚合物调制器潜在带宽可达60GHz以上。对高速直接调制器件进行了封装测试，传输速率大于25Gbps，功耗低至3.5pJ/bit。本项目实施对半导体材料和聚合物材料的优势互补光调制器具有促进作用，为推动新一代光网络和信息技术的发展具有意义。