面向SF6放电分解组分检测的金属氧化物/类石墨烯MoS2薄膜传感器阵列构筑与气敏性能研究

The detection and analysis of SF6 decomposition components under partial discharge is an important method for the status monitoring and fault diagnosis of gas insulation equipments, since it is of great significance to ensure the safe operation and condition-based maintenance of gas insulation equipments. The fabrication of highly sensitive and selective gas sensors, associating with the elimination of cross-sensitive response of the sensors to multi-gas components, not only are two bottlenecks in the detection of SF6 decomposition components, but also are the key common issues in high-precision and rapid detection of multi-component gases. By means of high-performance gas sensing nanomaterials and advanced sensing technologies, this work will use MEMS and self-assembly method to fabricate hierarchical metal oxide/graphene-like molybdenum disulfide film sensors, which are sensitive and selective to SF6 decomposition components. The sensor sensitivity and sensing performance will be enhanced through nano-decoration, doping and nano-structure adjustment. The sensing mechanism and characteristics of the sensors toward SF6 decomposition components will be investigated by combining the first-principles simulation and experimental exploration. This work will construct sensor array with selected gas-sensing units, along with the deep belief network-extreme learning machine combining method to realize the effective identification and and quantitative detection of gas components. The result of this work may provide a new method for the status monitoring and fault diagnosis of gas insulation equipments.

SF6放电分解组分的检测与分析是气体绝缘设备状态监测和故障诊断的重要手段，对于保障气体绝缘设备的安全运行和状态检修具有重要意义。研制高灵敏度和高选择性的气体传感器与抑制不同组分的交叉敏感性是SF6分解组分检测的瓶颈，也是多组分气体精准快速检测中要解决的关键共性问题。本项目以高性能微纳米气敏材料与先进传感技术为手段，采用微纳制造与自组装方法构建对SF6分解组分具有高敏感性和选择性的分等级金属氧化物/类石墨烯二硫化钼(MoS2)薄膜气敏传感器，通过筛选掺杂、纳米修饰和结构调控实现其灵敏度增强和传感性能提升，通过第一性原理模拟和实验测试相结合揭示金属氧化物/类石墨烯二硫化钼薄膜传感器对SF6分解组分的敏感机制与气敏特性。在此基础上，优选气敏单元构筑传感阵列协同深度置信网络-极限学习机模型实现SF6分解组分的识别与定量检测，为气体绝缘设备状态监测及故障诊断提供一种新方法。

SF6放电分解组分的检测与分析是气体绝缘设备状态监测和故障诊断的重要手段，对于保障气体绝缘设备的安全运行和状态检修具有重要意义。本项目采用理论模拟与实验测试相结合，以“新型材料-核心器件-智能检测”为路线，从构建新型敏感材料、制备气敏传感器件、构筑气敏传感阵列、分解组分识别检测等方面开展了系列研究工作。本项目获得的主要进展有：（1）开展分等级结构纳米金属氧化物的设计、制备、表征与性能研究，制备研发了一系列具有不同形貌/微观结构的分等级结构金属氧化物，研究了SF6放电分解组分气敏特性与分等级结构金属氧化物微观结构和形貌之间的关联规律。（2）采用微纳制造与自组装方法构建对SF6分解组分具有高敏感性和选择性的分等级金属氧化物/类石墨烯二硫化钼薄膜气敏传感器，通过筛选掺杂、纳米修饰和结构调控实现其灵敏度增强和传感性能提升，通过DFT理论和实验测试相结合揭示金属氧化物/类石墨烯二硫化钼薄膜传感器对SF6分解组分的敏感机制与气敏特性。（3）优选气敏单元构筑传感阵列并研究阵列信号处理方法，采用智能信息处理技术抑制SF6分解多组分的交叉敏感性，实现SF6分解组分的识别与定量检测，为气体绝缘设备状态监测及故障诊断提供一种新方法。基于本项目开展的面向气体绝缘设备六氟化硫分解组分气体检测的分级结构金属氧化物/类石墨烯MoS2薄膜传感器研制及特性研究，发展了一系列高增敏微纳传感材料和高性能微纳传感器，并对于推进微纳传感器在气体绝缘设备六氟化硫分解组分检测和故障诊断具有很好的应用前景。项目研究圆满完成各项研究任务，研究成果发表一系列高水平SCI收录论文，授权发明专利6项，获省部级科技奖励一等奖1项。