结合立体光刻3D打印的太赫兹金属网滤波器优化加工工艺研究

As the important THZ devices, metal mesh filters has been the imperative approach for spectrum screening in fields of THZ spectrum, THZ sensing and imaging as well as the terahertz free electron laser system. In order to break the mode of analysis, design and fabrication, this project focuses on exploring the route of optimal design and manufacture by combining the interdisciplinary technologies including 3D (Three-dimentional) printing, micro-fabrication and chemical electroless plating, on the basis of spectral analysis of THZ metal mesh filter. The starting point is to employ the electroless and microfabrication technique to substitute the electro-plating and photolithographic process to fabricate the free-standing composite structures, and simultaneously the aided design and fast production of multi-layer composite periodic structural array with multi-bandpass output characteristic by integration of 3D printing technology. Performance of this project involves the comprehensive application of methods of theoretical prediction, optimal design and numeric verification as well as strict characterization and spectrum test by scanning electronic microscope and THZ spectrum analysis, to ultimately realize fast and low-cost fabrication of THZ metal mesh filter, which is of great significance to applications such as biomedicine, defense and security and astronomical observation.

金属网络滤波器作为重要的太赫兹器件，是太赫兹光谱、太赫兹传感与成像、太赫兹自由电子激光器系统等应用中实现频谱筛选的必要途径。本项目旨在突破太赫兹金属网滤波器的分析、设计及加工模式，在太赫兹复合金属网结构的频谱特征分析基础上，重点探索结合立体光刻3D (Three-dimensional)打印、微加工以及化学无电沉积多技术交叉的设计与制作路线。出发点在于利用微加工与无电沉积技术替代复杂多步骤的光刻及电镀工艺，实现基于单次曝光与显影的独立自支撑复合结构加工，同时结合立体光刻3D打印技术，实现具有多频带输出特征的多层复合结构阵列的辅助设计及快捷制作。本项目的开展，将综合运用理论分析、优化设计、数值验证以及工艺试验等手段，并利用扫描电子显微成像、太赫兹光谱分析进行严格的结构表征与频谱性能测试，最终实现太赫兹金属网滤波器的快速低成本制作，对生物医学、军事安防、天文观测等太赫兹应用领域的具有重大意义。

金属网络滤波器作为重要的太赫兹器件，是太赫兹光谱、太赫兹传感与成像、太赫兹自由电子激光器系统等应用中实现频谱筛选的必要途径。本项目旨在突破太赫兹金属网滤波器的分析、设计及加工模式，在太赫兹复合金属网结构的频谱特征分析基础上，重点探索结合立体光刻3D(Three-dimensional)打印、微加工以及化学无电沉积多技术交叉的设计与制作路线。出发点在于利用微加工与无电沉积技术替代复杂多步骤的光刻及电镀工艺，实现基于单次曝光与显影的独立自支撑复合结构加工，同时结合立体光刻3D打印技术，实现具有多频带输出特征的多层复合结构阵列的辅助设计及快捷制作。本项目的开展，将综合运用理论分析、优化设计、数值验证以及工艺试验等手段，并利用扫描电子显微成像、太赫兹光谱分析进行严格的结构表征与频谱性能测试，最终实现太赫兹金属网滤波器的快速低成本制作，对生物医学、军事安防、天文观测等太赫兹应用领域的具有重大意义。