自供电低功耗热电-光电集成微传感器在物联网射频收发组件中的应用基础研究

Self-powered low-power micro sensors are key devices to achieve green communications in microwave transceiver. Based on the self-powered low-power thermoelectric-photoelectric integrated micro sensor, this project proposes a novel RF transceiver module used in the internet of things. Using silicon CMOS technology, a PN junction in the semiconductor arm of the thermocouple structure is made, and the micro sensor harvesting light and heat two kinds of energy is formed. Both of the light energy and the heat energy dissipated by the transmitting circuit in the RF transceiver module are converted into the electric energy. This kind of energy harvesting based on the micro sensor provides the electrical power to the RF transceiver module, and solves the heat dissipation of the transmitting circuit at the same time. No DC power consumption meets the requirements of the low power consumption of the internet of things. In terms of the design theory and the implementation method, the heat-electricity and light-electric conversion model of the micro sensor, the cross energy domain interaction model and the multi parameter coordination model of the self powered RF transceiver module will be put, for achieving the integrated system collaborative design of the micro sensor and the RF transceiver module. The implementation method of the fabrication, assembly, packaging and reliability of the micro sensor and the novel RF transceiver module, which are compatible with MEMS technology, Si CMOS process and the low temperature co-fired ceramic (LTCC) technology, will be developed, and the prototype machine of the novel RF transceiver module will be made, and the correctness of the above design theory and implementation method will be validated by experiments in the internet of things.

自供电低功耗微传感器是实现物联网射频收发组件绿色通信的关键器件，本项目创新性地提出了适用于物联网射频收发组件的自供电低功耗热电-光电集成微传感器结构，基于硅基CMOS技术，在热电偶结构的半导体臂中制作一个PN结，形成了收集光和热两种能量的微传感器，同时将光能和收发组件发射部分所耗散的热能转换为电能。这种基于微传感器的能量收集，不仅为射频收发组件提供自供电，而且还能解决其中发射部分的散热问题；没有直流功耗，满足了物联网通讯低功耗要求。在设计理论和实现方法方面，将建立微传感器的热-电和光-电的转换模型、自供电射频收发组件跨能域的交互模型和多参数协同模型，解决热电-光电集成微传感器和收发组件集成系统协同设计理论的基础问题；并建立其基于MEMS技术、LTCC技术和CMOS工艺的集成制备、封装、测试和可靠性的兼容实现方法；研制出新型自供电射频收发组件，用物联网实验验证以上设计理论和实现方法的有效性。

自供电低功耗微传感器是实现物联网射频收发组件绿色通信的关键器件，本项目创新性地提出了适用于物联网射频收发组件的自供电低功耗热电-光电集成微传感器结构，形成了光和热两种能量收集微传感器，同时将光能和收发组件发射部分所耗散的热能转换为电能，不仅为射频收发组件提供自供电，而且还能解决其中发射部分的散热问题；没有直流功耗，满足了物联网通讯低功耗要求。在热电-光电集成微型能量收集器的设计理论上，提出了一种标准的热电-光电集成微型能量收集器结构和两种分别调整过热电偶臂形状和热电堆排布的器件结构，实现了热电-光电两种功能的单片集成；建立了多场耦合条件下的等效电路模型用于分析微型热电式发电机和光电池的输出特性，可实现结构参数、材料参数和应用环境参数等多参数间的协同设计与优化；分别采用ANSYS Workbench协同仿真平台下的热电耦合仿真和Silvaco TCAD光电仿真对微型热电式发电机和光电池的输出特性进行仿真，进一步对提出的结构进行验证；因热电材料的材料参数直接影响到器件的性能，同时亦反映在模型和仿真中，决定了热电-光电集成微型能量收集器的最佳结构尺寸，分别设计了相应的材料参数测试结构对多晶硅的电阻率、接触电阻、Seebeck系数进行表征，用于指导器件结构、材料和制备工艺的进一步优化。在热电-光电集成微型能量收集器的实现方法上，采用常规MEMS工艺完成热电-光电集成微型能量收集器以及材料参数测试结构的制备；为了确定测试中热电-光电集成微型能量收集两端的温差，设计了一个可行的测试方案对其热电输出性能进行测试，标准结构的最大输出功率因子为6.3×10-3μWcm-2K-2，最大输出电压因子为0.316Vcm-2K-1；光电测试中分别对器件上下两个表面受光时的IV特性进行测量，对应的效率分别为4.11%和0.5%。最后给出了热电-光电集成微型能量收集器在射频收发组件中的应用示例，用物联网实验验证以上设计理论和实现方法的有效性。