环间嵌入电极的多环谐振式微机械陀螺关键技术研究

Micro Disc Resonance Gyroscope (μDRG) is a kind of new solid state gyroscope which is developed on the basis of Hemispherical Resonator Gyroscope (HRG). Compared with the conventional micromachined gyroscope, the μDRG don't need a complicated three-dimensional processing technology, the process of μDRG can compatible with the conventional MEMS process. On the other hand, the μDRG is proved to be robust and highly adaptive to the environment in the practical application. Therefore, it has been the focus to study on the μDRG. In this project, we focused on the limit of electrode of μDRG, a new kind of polycyclic resonance gyroscope with embedded electrodes is proposed, and solutions on some key problems such as low frequency cracking structure design, wafer-level vacuum package, and closed-loop detecting technology are presented as well. This project is break through the key technology of layout strategy of embedded electrodes, wafer-level vacuum package based on Through Glass Via (TGV), and electrostatic tuning technology of embedded electrodes, to design a MEMS polycyclic resonance gyroscope with embedded electrodes, in order to obtain a high precision principle prototype.

微型碟形谐振陀螺是在半球谐振陀螺基础上发展起来的一种具有微型固体波动陀螺，与常规MEMS陀螺相比，微型碟形谐振陀螺不需要复杂的三维成型工艺，可兼容常规的微机电系统MEMS加工工艺，工艺实现性好，同时其对环境振动不敏感、对温度不敏感的特点，结构鲁棒性好。因此，微型碟形谐振陀螺已成为国际上近年来高精度微机械陀螺研究的热点。本项目针对碟形谐振陀螺电极偏少的问题，提出一种环间嵌入电极的高精度多环谐振式微机械陀螺，针对其低频率裂解结构设计、圆片级真空封装工艺、闭环检测技术等问题，突破嵌入式电极布置策略、基于TGV的圆片级真空封装、基于嵌入式电极的静电平衡调整等关键技术，完成多环谐振式微机械陀螺设计及制备，获得高精度多环谐振式微机械陀螺样机。

多环谐振式微机械陀螺是结合了MEMS技术与半球谐振陀螺各自有点的新型惯性器件，具有高精度潜力，在航空航天、武器装备、汽车电子等领域具有较好的应用前景。.本项目以环间嵌入电极的高精度多环谐振式微机械陀螺为研究对象，针对其低频率裂解结构设计、圆片级真空封装工艺、闭环检测技术等问题，突破嵌入式电极布置策略、基于TGV的圆片级真空封装、基于嵌入式电极的静电平衡调整等关键技术，完成多环谐振式微机械陀螺设计及制备，获得高精度多环谐振式微机械陀螺样机。.项目完成了环间嵌入电极的多环谐振式微机械陀螺高精度实现机理及方案设计。首先，提出了基于遗传算法的多环陀螺结构优化方法，获得低频率裂解的多环谐振式微机械陀螺方案；建立了多环谐振式微机械陀螺的热弹性阻尼耗散模型，完成了低能量耗散的多环谐振式微机械陀螺方案设计；提出一种模态能量集中的八边多环谐振微机电陀螺，有助于提高器件的能量分布。其次，完成了针对多环谐振式微机械陀螺的两种加工工艺开发，分别加工出陀螺样机，提出了圆片级真空封装方案，有助于提升器件整体性能。最后，完成了多环谐振陀螺检测及频率修调原理研究，完成了多环谐振陀螺检测电路设计。.测试结果表明，本项目设计开发的多环谐振式微机械陀螺零偏稳定性可达0.21°/h，具有较好的高精度潜力。