基于表面等离子体效应的薄膜材料特征参数测试理论与原位表征评价方法研究

Characteristic parameters of thin films within nanometer scale, includes geometric parameters (such as thickness and surface quality) and optical characteristic parameters(such as photometric characteristics, optical constants), are the key factors to affect the film properties and its applications. High resolution and reliability of thin film characteristic parameters measurement method, with simple structure and easy to be adopted online in situ measurement, is the key theory and method problem to be solved currently. Through the study on theoretical model of beam reflection coefficient and phase shift of the SPR modulated by the polarized light waves modulated by the characteristic parameters such as film thickness and optical constants, the relationship between the development of near field enhancement effect and the thin film surface characteristic parameters such as specific structure and optical parameters can be studied. Through the development of testing system for SPR phase detection method based on the differential model structure of double reflective prisms design, experimental verification can be carried out to verify the theoretical model and detection model of SPR phase detection method for the characteristic parameters of thin film, and the effective ways to improve the measuring model and method can be studied. Through the research of effective technical solution for online, in situ measurement and test system structure based on those models mentioned above for thin film characteristic parameters, system calibration method of characteristic parameters of nano thin film measurement and evaluation method based on the model of differential type SPR phase film thickness and related characteristic parameters measurement can be propounded. The new methods and theoretical- experimental basis for ultra-precision measurement and the characteristics evaluation system for thin film surface parameters will be provided.

纳米级薄膜特征参数，包括几何参数(如厚度和表面质量)和光学特性参数(如光度特性和光学常数)是影响其性能和应用的关键因素，高测量分辨力和可靠性且结构简单易于在线原位测量的薄膜特征参数测量是目前亟待解决的关键理论和方法问题。通过研究薄膜结构中受薄膜厚度、光学常数等特征参数调制的偏振光波的光束反射系数以及SPR相移的理论模型，开展近场增强效应与薄膜表面特定结构和光学特性等参数的相互关系的研究；通过设计研制基于SPR相位检测方法的差分型反射双棱镜新型结构的测试系统，对SPR相位特征参数检测的理论模型和检测模型进行实验验证，研究测量模型和方法改善的有效途径；通过研究基于上述模型的用于薄膜特征参数的在线、原位测量的有效技术方案和测试系统结构，提出基于差分型SPR相位膜厚等特征参数测量模型的纳米薄膜特征参数测量与评价系统的标定方法；为薄膜表面参数的超精密测量和特征评价体系提供新方法以及理论和实验依据。

几何参数和光学特性参数等特征参数是影响纳米级薄膜性能和应用的关键因素，高测量分辨力和可靠性且结构简单易的薄膜特征参数测量是目前亟待解决的关键理论和方法问题。通过研究薄膜结构中受薄膜厚度、光学常数等特征参数调制的偏振光波的光束反射系数以及SPR相移的理论模型，开展了薄膜近场增强效应光学特性的研究，包括单多层纳米薄膜、差分型新型结构的SPR相移检测理论模型和测试系统，对SPR相位特征参数检测的理论模型和检测模型进行了实验验证，并研究了测量模型和方法改善的有效途径；研究了基于上述模型的用于薄膜特征参数计算的SAPSO、IAGA迭代计算模型，解决了单多层膜的光学常数通过SPR相位法的求解问题；实现了对100nm内厚度、10mm×10mm面内扫描、离面方向优于0.2nm测量分辨力的薄膜几何参数测量，膜厚测量和光学常数测量重复性误差小于5%；提出了基于光自旋霍尔效应PSHE的薄膜特性参数检测理论分析模型，建立了实验验证系统对理论分析进行了有效验证，并实现了PSHE弱测量与SPR相移检测的比对测试分析以及利用SPM和椭偏仪进行测量方法标定的方案；为薄膜表面参数的超精密测量和特征评价体系提供了新方法以及理论和实验依据。