CuNM3(M=Ni,Co,Fe)反钙钛矿结构薄膜的溶液法制备、生长机理及物性研究

Transition metal nitrides have advanced properties, such as superhard properties, high melting point, chemical inertia, high thermal conductivity and so on, which can be used in many applications. However, it is a challenge to prepare pure metal nitride due to the complex metal-nitrogen phase diagram. At present the most widely studied ternary metal nitride is a compound of antiperovskite structure. To investigate the intrinsic growth machanism and physical properties , it is desirable to develop an effective route to synthesis single crystals and high quality thin films. Based our previous results about metal nitride thin films, in this proposal we will prepare CuNM3(M=Ni,Co,Fe) thin films with advanced properties by chemical solution deposition under ambient pressure. The growth mechanisms as well as the microstructures and physical properties will be investigated. The main factors in controlling of the physical properties will be studied and the correlation between processing, N content and physical properties will be established. The results will provide guidance to optimize the properties of other metal nitrides with antiperovskite structure.

金属氮化物通常具有超硬、高熔点、化学惰性、高热导性等优越性能，在诸多领域有着广泛应用。但是，由于金属-氮的相图比较复杂，从而很难获得纯相的金属氮化物。目前研究最为广泛的三元金属氮化物为一种反钙钛矿结构的化合物。为了更好地研究金属氮化物的生长机理及物性，制备单晶及高质量薄膜成为研究的有效手段。本项目在我们已有金属氮化物薄膜的研究基础上，采用适合大尺寸薄膜生长的溶液法制备CuNM3(M=Ni,Co,Fe)薄膜，在常压烧结条件下获得优越性能的薄膜。探索CuNM3(M=Ni,Co,Fe)薄膜的生长机制并构建薄膜生长相图，通过工艺参数对薄膜的微结构和晶界特性及物性进行调控。揭示影响CuNM3(M=Ni,Co,Fe)薄膜物性的主要影响因素，建立微结构-N含量-性能之间的关联。CuNM3(M=Ni,Co,Fe)薄膜的研究为其他反钙钛矿结构的金属氮化物提供了实验和理论基础。

金属氮化物通常具有超硬、高熔点、化学惰性、高热导性等优越性能，在诸多领域有着广泛应用。但由于金属-氮的相图比较复杂，从而很难获得纯相的金属氮化物。目前研究最为广泛的三元金属氮化物为一种反钙钛矿结构的化合物，为了更好地研究金属氮化物的生长机理及物性，制备单晶及高质量薄膜成为研究的有效手段。我们在已有金属氮化物薄膜的研究基础上，采用适合大尺寸薄膜生长的溶液法制备CuNFe3及Cu3NPdx薄膜，在常压烧结条件下获得优越性能的薄膜。基于金属氮化物的超导材料，由于高硬度和较高超导转变温度(Tc)共存，从而被认作为一类具有特殊意义的功能材料即硬质超导材料。在研究三元金属氮化物生长机理和物性的同时，继续探索CrN/MoN/NbN等二元金属氮化物薄膜的制备及性能研究。观察到CrN薄膜强磁场低温下超低磁阻以及零磁场下较大的电阻对温度的灵敏度，同时得到均匀致密的δ-MoN和δ-NbN外延金属氮化物超导薄膜。本研究扩展了化学溶液沉积法的应用范围，深入探索揭示影响金属氮化物薄膜物性的影响因素，建立微结构-N含量-性能之间的关联，为制备其他新型氮化物薄膜提供了实验和理论基础。