基于Stewart平台的低频微振动主动减振控制系统研究

With the continuous improvement of the performance of large scientific installations under construction or improved and upgraded all over the world, high energy, high brightness, low emittance and nano-scale spot of high energy synchrotron radiation light source beam line station and other scientific research equipment have higher requirements for the stability, adjustment accuracy, accurate orientation and other erformance of theirs supporting platforms. Multi degree of freedom active vibration and precision orientation support platform will become the key quipment for the development of various scientific devices in the future (such as high energy synchrotron radiation light source, free electron laser, etc.). This research project is mainly based on Stewart platform to carry out the research of low frequency micro-vibration active control system. Many key technologies will be solved under the research，such as the kinematics analysis of the attitude adjusting system，kinematic calibration and precision compensation，Dynamic analysis of parallel mechanism，multichannel decoupling control for the active vibration system，design of the vibration adaptive filtering algorithm，research and development of rapid control system based on DSP core. The platform equipment of parallel 6-dof active vibration control system will be developed. And the applied research and achievement transformation will been carried out too. Through the independent research and development and integrated innovation, a high performance attitude adjusting system and active vibration control system with independent intellectual property rights and popularization and application will been formed, which will provide equipment and technical support for the future high energy synchrotron radiation light source, high energy physics collider and other large scientific. The research can break the deadlock of dependence on imports.

随着世界各国在建或改进升级的大科学装置性能的不断提高，高能量、高亮度、低发射度和纳米尺度光斑的高能同步辐射光源的光束线站等科研设备对其支撑平台的稳定性、调节精度、准确定向等性能有更高的要求，多自由度主动减振和精密定向支撑平台将成为未来各大科学装置（如高能同步辐射光源、自由电子激光等）发展的关键设备。本项目主要基于Stewart平台开展低频微振动主动控制系统研究，重点攻关解决调姿系统的运动学分析、运动学标定与精度补偿、并联机构动力学分析、主动减振系统多通道解耦控制、振动自适应滤波算法设计、基于DSP主核架构的快速控制系统研发等关键技术；开发出并联六自由度主动减振控制系统平台设备，并开展应用研究和成果转化工作。通过自主研发与集成创新，形成具有自主知识产权和可推广应用的高性能调姿与主动减振控制系统，为未来高能同步辐射光源和高能物理对撞机等大科学装置提供设备与技术支撑，打破依赖进口。

随着世界各国在建或改进升级的大科学装置性能的不断提高，高能量、高亮度、低发射度和纳米尺度光斑的高能同步辐射光源的光束线站等科研设备对其支撑平台的稳定性、调节精度、准确定向等性能有更高的要求，多自由度主动减振和精密定向支撑平台将成为未来各大科学装置（如高能同步辐射光源、自由电子激光等）发展的关键设备。. 本课题采用压电陶瓷驱动的并联六自由度平台实现系统的主动减振控制，重点研究了六作动器减振平台的解耦控制算法。首先在并联六自由度平台运动学基础上，重点研究了并联平台姿态正反解调节、误差分析与运动学标定补偿的全流程控制算法；其次采用牛顿-欧拉方法建立了并联六自由度减振平台的动力学模型，分析了平台的通道耦合属性，给出了并联六自由度减振平台的一种通用解耦控制算法，将耦合平台分解成两个独立的单输入单输出和两个耦合的两输入两输出的子系统实，通过解耦控制策略实现每个自由度都可以独立控制；再次详细分析了Fx-LMS自适应滤波和次级通道辨识算法的原理与应用；最后在NI Compact-RIO硬件平台上搭建了主动减振测试系统，通过实验验证了基于压电陶瓷驱动的并联六自由度减振平台的主动减振性能和解耦控制策略的有效性。采用Fx-LMS作为核心控制算法，系统在低频激振下取得了良好的减振效果，相关研究成果可以为南方高能同步辐射光源建设提供设备与技术支撑。