可用于深度非球面高精度、通用化检测的非零位环形子孔径拼接干涉检测技术研究

Aspherics have become widely employed these days and there have been increasing demand for testing large number aspherics of variety shapes. Besides high precision, there are increasing requirements for efficient, online, and general aspheric testing, and also testing of deep aspherics. Thanks to the previous study, we are intending to perform a research on non-null annual subaperture stitching interferometry for fast, high precision, and general testing of aspherics. A serialized partial compensation lens (PCL) system, which can help to obtain general test for the most-employed aspherics, will be established and PCLs of limited quantity that can partially compensate for aspherics of similar parameters will be evaluated and optimized within the system. In order to eliminate the retrace error of non-null aspheric testing, an iterative reverse optimization reconstruction procedure is proposed, based on modeling of the testing system and iterative multiple ray-tracing. Based on the study above, the non-null annual subaperture stitching interferometry which employs aspheric wave as the reference is proposed to extend the dynamic range of the non-null compensation method and the standard annual subaperture stitching interferometry, and then the fast, high precision, and general testing of deep concave aspherics is realized.

当下，非球面在各个领域的应用越来越多且呈现多元化，使得光学加工车间中有大量的、形状各异的非球面需要检测。而对非球面检测的要求，除了高精度外，还非常关心检测效率、实时性、通用性等，并且还希望可以检测深度非球面。在汲取了前人研究成果的基础上，本项目拟开展非球面非零位环形子孔径拼接干涉检测技术的研究工作，努力实现深度非球面的快速、高精度、通用化检测。研究构建系列化部分补偿透镜体系，将有限数量的、可对一定参数范围内常用非球面实现部分补偿的部分补偿透镜进行统一评价和优化，以实现大部分常用非球面的通用化检测。研究基于实际干涉检测系统计算机建模的逆向迭代优化重构技术，利用多次迭代的光线追迹，去除非零位干涉检测系统的回程误差影响。研究基于部分补偿法的非零位环形子孔径拼接技术，利用非球面波前作为参考波，有效拓展了部分补偿法及标准环形子孔径拼接法的动态范围，实现深度凹面非球面的高精度、通用化检测。

当下，非球面在各个领域的应用越来越多且呈现多元化，使得光学加工车间中有大量的、形状各异的非球面需要检测。而对非球面检测的要求，除了高精度外，还非常关心检测效率、实时性、通用性等，并且还希望可以检测深度非球面。在汲取了前人研究成果的基础上，本项目拟开展非球面非零位环形子孔径拼接干涉检测技术的研究工作，努力实现深度非球面的快速、高精度、通用化检测。研究构建了系列化部分补偿透镜体系，将有限数量的、可对一定参数范围内常用非球面实现部分补偿的部分补偿透镜进行统一评价和优化，以实现大部分常用非球面的通用化检测。研究了基于实际干涉检测系统计算机建模的逆向迭代优化重构技术，利用多次迭代的光线追迹，去除非零位干涉检测系统的回程误差影响。基于上述成果，研究基于部分补偿法的非零位环形子孔径拼接技术，利用非球面波前作为参考波，有效拓展了部分补偿法及标准环形子孔径拼接法的动态范围，实现深度凹面非球面的高精度、通用化检测。