铜铁矿结构CuXO2(X=Y,Sc,Al)红外透明导电薄膜的光电性能和择优取向制备研究

IR transparent conductive film has an important application in the field of national defense， such as the front of infrared missile to improve missile performance。Existing visible transparent conductive film, due to the plasma oscillation frequency ωp, is not transparent to mid-infrared light。So it is necessary to develop a mid-infrared transparent conductive CuXO2(X=Al,Sc,Y) film，and the scientific issues included: increasing infrared transmittance t, σ and carrier mobility μ, and the innovation is significant increase in the conductivity σ and preferred orientation growth of thin film。Study on conductive mechanism: the reason of absorption peaks occur in pairs , relation between Phonon and Cooper, interaction between Phonon and Cu+ ion effects on σ；The effects of Copper room, oxygen content and thin layer on σ and t；Study on the effects of doped with different concentration of impurities, content, copper and aluminum, hole n, on the rate of absorption peaks on the migration on the μ and σ, ω p and t；Study on free-carrier infrared absorption of optical mechanisms, interaction of the hole, electronic and acoustic, study on the interaction of infrared optical and carrier, and lattice vibration coupling。Study on different substrate materials, crystal surfaces and heat treatment, how to impact on the orientation growth, the degree of single crystal, σ and T。Study on the influence of deposition parameters on the quality of the film 、σ and t , influence on surface roughness、Crystal grain diameter。Study on the effects of the annealing and substrate on t and σ. We have published 15 papers about infared transparent conducting oxide thin film.

红外透明导电膜在军事、工业领域有重要应用价值，如用于红外导弹头，可提高导弹性能。现有的可见光透明导电膜，不透射中红外光。所以需要研制CuXO2(X=Al,Sc,Y)(目标)。关键是提高红外透射率T和电导率σ。科学问题是：增加载流子迁移率μ。创新点：择优取向生长薄膜，增加σ。研究Cu+离子层中，Cu+-Cu+间的相互作用；研究Cu短程有序的重要性；研究载流子μ、浓度N，与材料组分和结构关系；研究成对弱吸收峰起源、与σ和T关系、与声子、库珀对关系；研究氧浓度与σ、T关系。研究自由载流子吸收机制，研究空穴和声子相互作用。研究衬底对σ的影响。研究不同制备方法对薄膜的影响；研究不同衬底材料、不同晶面、热处理，对取向生长影响、对提高单晶化影响、对σ、T影响。研究制备条件和参数，对薄膜结构、质量、σ、T影响，对表面形貌、晶粒直径和结晶状况影响。我们已研究了氧化物红外导电膜,发表了15篇文章。

红外透明导电膜在军事、工业领域有重要应用价值，如用于红外导弹头，可提高导弹性能。现有的可见光透明导电膜，不透射中红外光。所以需要研制CuXO2(X=Al,Sc,Y)透明导电薄膜；本项目主要研究载流子μ、浓度N，与材料组分和结构关系，研究自由载流子吸收机制，研究空穴和声子相互作用，研究衬底对σ的影响。研究不同制备方法对薄膜的影响；采用不同衬底材料、不同晶面、热处理，完成研制出择优取向的铜铁矿结构的CuXO2红外透明导电薄膜，并且达到技术指标，阐述了导电机制，取向生长条件。透射波段范围达到3-5μm；红外透过率达到80％；③薄膜方块电阻20Ω/□。由于铜铁矿结构的CuXO2层状结构，电导率的各向异性，Cu短程有序，取向生长更容易实现改善电导率；已发表6 篇研究型论文。