基于三维结构探测原理的阵列式共焦显微超分辨传感机理

The study of one super-resolution method and technology of array scanning confocal microscopy based on three-dimensional structured detection will be focused on the problem of the need in improving lateral resolution and low measurement efficiency. The following are the major issues addressed by this study. Firstly, the study of three-dimensional incoherent imaging theoretical model of confocal microscopy system based on lateral structured detection is to set up the super-resolution confocal microscopy system based on annular structured detection for the solution of decrease of lateral resolution caused by finite-sized detection in confocal microscopy system. Secondly, lateral structured detection and axial differential method are combined to establish the theoretical model of three-dimensional incoherent imaging in confocal microscopy system based on lateral structured detection to improve lateral resolution and axial response characteristic meanwhile. Thirdly, the image reconstruction method of confocal microscopy system will be studied. Fourthly, array scanning confocal microscopy based on structured detection will be set up. Lastly, based on theory, method and integrated technology of each unit above, the principled sample machine of array scanning super-resolution confocal microscopy system will be developed and can be widely applied in many fields such as the production of super-large-scale integration, micro structure and micro array optical element as well as the high-resolution imaging of biological fluorescent specimen.

针对共焦显微技术需改善系统的横向分辨力以及测量效率低的问题，研究一种基于三维结构探测原理的阵列式共焦显微超分辨方法与技术。主要研究内容：1）研究基于横向结构探测原理的共焦显微系统的三维非相干成像理论模型，建立基于环形结构探测原理的超分辨共焦显微系统，克服共焦显微系统有限尺度探测降低系统横向分辨力的问题; 2）将横向结构探测与轴向差动技术集成到三维结构探测原理中，建立基于三维结构探测原理的共焦显微系统的三维非相干成像理论模型，在提高横向分辨力的同时兼顾改善系统轴向响应特性；3）基于横向结构探测原理的共焦显微系统图像重构方法研究；4）建立基于结构探测原理的阵列式超分辨共焦显微系统；5）基于上述理论、方法和各单元集成技术基础上的阵列式超分辨共焦显微系统原理样机的研制，该系统可广泛应用于超大规模集成电路、微结构和微阵列光学器件制造以及生物样品高分辨率成像等领域。

本项目研究了一种基于三维结构探测原理的阵列式共焦显微超分辨传感方法与技术。主要完成了以下工作：1）完成了基于结构探测原理的相干与非相干共焦显微超分辨方法与技术理论研究以及基于结构探测的共焦显微超分辨图像重构算法的研究，并通过实验验证结构探测实现了1.8倍于普通宽场显微成像的分辨力；2）完成了基于空间光调制器的相干结构探测共焦显微成像方法研究，将液晶空间光调制器引入到共焦系统探测段端，通过硬件实现了结构探测，相干照明条件下，在保证扫描精度与结构探测共焦系统成像分辨力的同时，扫描速度提高33倍；3）完成了基于时空调制的阵列式非相干结构探测共焦显微成像方法研究，通过时空调制扫描光斑实现了阵列式光斑图像的快速采集，扫描速度提高150倍；4）完成基于上述方法和各单元技术集成基础上的超分辨结构探测共焦显微成像原理样机的研制。本研究内容中关于超分辨结构探测共焦显微成像的研究成果已经直接应用于国家重大科学仪器专项子项目“超高分辨率反射式立体层析共焦显微镜”的研制中,使共焦系统的横向分辨力得到显著提高。本项目培养研究生11名，发表论文SCI和EI检索论文8篇,其中SCI论文5篇，EI论文3篇，申请发明专利18项，参加国际会议2次，与国内外专家学者进行了广泛的学术交流。