粒子加速器用自适应高精度电容式静力水准系统关键技术研究

With particle accelerators becoming larger and research objects becoming smaller, the stability and emittance of particle beams are required to be improved, which results in that the present hydrostatic level systems (HLSs) are not able to meet the future demand of particle accelerator devices for the vertical displacement monitoring equipment with high precision. Thus, in this project the hybrid process of “screen printing” and “film deposition” and the on-line calibration method based on “error-separation” are proposed to develop self-adaptive and capacitive HLSs with high precision based on the previous research of capacitive displacement sensors. Firstly, the error model of capacitive displacement sensors will be established by analyzing the error sources and the preparation process and error compensation method will be improved. Then, the capacitive HLS will be integrated by combining MEMS accelerators with capacitive displacement sensors. According to the transformation algorithm from “Euler Angles” to “Quaternions”, the on-line calibration method will be studied, which will transform HLSs from “passive calibration type” to “active adaption type” and improve the precision. This project is aimed to provide the theoretical and methodological guidance for the development of high precision HLSs and the alignment method with high precision for Hefei Advanced Light Source (HALS) Facility and other large precision facilities.

随着粒子加速器装置尺寸越来越大，研究对象尺度越来越小，对粒子束稳定性和发射度等性能要求越来越高，导致目前广泛使用的静力水准系统难以满足未来新建或升级改造的粒子加速器对垂直方向位移检测精度的需求。为此，本项目组在前期电容位移传感器制作及测试与标定基础上，提出一种“厚-薄”混合工艺和基于“误差分离”的在线校准方法，开展自适应高精度电容式静力水准系统的关键技术研究。基于误差源分析和模型构建，完善电容位移传感器的制作工艺和误差补偿方法；采用加速度计和电容位移传感器整体融合方案，开展电容式静力水准系统的集成；依据“欧拉角-四元数”转换算法，研究静力水准系统的在线校准技术，实现其“被动标定型”到“主动适应型”转变，提高垂直方向位移的检测精度。该申请旨在为研制高精度电容式静力水准系统提供理论和方法指导，同时也为新一代合肥同步辐射光源预研与验证装置以及其他大型精密工程的准直和形变测量提供可靠的技术手段。

随着粒子加速器装置尺寸越来越大，研究对象尺度越来越小，对粒子束稳定性和发射度等性能要求越来越高，导致目前广泛使用的静力水准系统难以满足未来新建或升级改造的粒子加速器对垂直方向位移检测精度的需求。为此，本项目组在前期电容位移传感器制作及测试与标定基础上，提出一种“厚-薄”混合工艺和基于“误差分离”的在线校准方法，开展自适应高精度电容式静力水准系统的关键技术研究。发展了一种标准开尔芬保护环膜电极制作工艺，有效提高了工作区域电场均一性；采用三轴加速度计集成了姿态测量模块，俯仰角和翻滚角测量精度分别达到0.1°。采用姿态模块和电容位移传感器整体融合方案，开展电容式静力水准系统的集成；依据“欧拉角-四元数”转换算法，研究静力水准系统的在线校准技术；同时，开展了电容式静力水准系统整体方案设计，通过结构优化，设计出了两代静力水准系统，第二代与第一代相比，集成度更高，尺寸更小，外径从136mm减小到102mm，在量程11mm的范围内，位移测量分辨率可达 1μm。这为后续的应用打下了坚实的基础。该项目的研究结果将为研制高精度电容式静力水准系统提供理论和方法指导，同时也为新一代合肥同步辐射光源预研与验证装置以及其他大型精密工程的准直和形变测量提供可靠的技术手段。