金属薄膜力学性能的动态表征和能量判据

The certain energy are applied on surface of thin film/matrix samples through layer-by-layer in a impacting way. Tangential force, normal force, and the change of energy are measured during the process that the stylus intrudes into the thin film, reaches the matrix through interface and leaves the surface. With geometric shape parameters of wear trace, some mechanical parameters of metal thin film materials, such as elastic modulus, cohesive energy, dynamic hardness and adhesive strength between film and substrate etc., can be derived from stress-strain-fracture model. This project will establishes the dynamic characteristic criteria, normalizes measure method and may provids the principle for the design of thin film materials and the optimization of processing parameter.

以冲击方式将设定能量通过划头逐层施加于薄膜/基体样品表面，测定划头从入侵薄膜穿过缑娴交牟⒙映霰砻婀讨校邢颉⒎ㄏ蛄湍芰勘浠岛鄄奂负尾问佑αΑΡ洹狭涯Ｐ偷汲鼋鹗舯∧げ牧系阅Ａ俊⒛诰酆徒岷锨慷取⒍捕鹊攘ρР问范ㄐ阅芏碚髋芯荩娣恫馐苑椒ê蜕璞敢瞧骰∧げ牧仙杓朴牍ひ沼呕峁┲傅荚颉