基于运动相位光频同步补偿的动态扫频干涉激光测距方法与相关技术基础研究

In order to meet the needs of large-scale scientific engineering and large-scale equipment manufacturing for high-accuracy dynamic laser measurement and to the problem that existing method is hardly used for non-cooperative target measurement and system complexity and high cost at the same time, we try to explore a method of absolute distance measurement of dynamic swept interference based on motion phase optical frequency synchronization compensation, by separating the motion phase of the swept-frequency interference measurement, the dynamic error is eliminated from the measurement mechanism based on the compensation after the optical frequency synchronization measurement, meanwhile the decline of signal-to-noise ratio caused by the time domain nonlinearity of the scanning frequency is avoided; At the same time, the active chirped optical frequency synchronization nonlinear correction and heterodyne interference optical frequency on-line measurement method are proposed to compensate the motion phase measurement and extraction error; An optical frequency synchronization calibration method of measurement standard based on gas absorption spectrum is proposed, the one-time calibration before the measurement is changed to online calibration traceability for each measurement, and the calibration error of dispersion and temperature is compensated based on chirped decomposition transformation and online calibration of temperature. High accuracy online calibration of measurement standard is achieved for large sweep frequency range and temperature range; Finally, with the organic fusion of the method mentioned, we form new methods and devices of dynamic swept interference laser precision distance measurement with non non-cooperative target measurement capability and the hundred micro meters level measuring accuracy in the rang of 100 meters. The research of this project has potential application in forefront fields such as large-scale scientific installations and large-scale aerospace equipment manufacturing.

为满足大型装备制造与大科学工程对高精度动态测量的需要，同时针对现有方法难以用于非合作目标测量以及系统复杂和成本高的问题，探索一种基于运动相位光频同步补偿的动态扫频干涉绝对距离测量方法，通过分离扫频干涉测量运动相位，基于光频同步测量后补偿，从测量机理上消除动态误差，同时避免扫频时域非线性引起的信噪比下降；与此同时，提出主动啁啾光频同步非线性校正和外差干涉光频在线测量方法，补偿运动相位测量与提取误差；提出基于气体吸收谱的测量基准光频同步标定方法，变测量前一次性标定为每次测量中在线标定溯源，并基于啁啾分解变换与温度在线标定补偿色散和温度标定误差，实现大扫频范围和温度范围的测量基准高精度在线标定；最后，将上述方法有机融合，形成百米测量范围内、百微米级测量精度且具有非合作目标测量能力的动态扫频干涉精密测距新方法与装置。本项目研究在大科学装置、大型航空航天装备制造等前沿领域具有潜在的广泛应用前景。

大型装备制造、大科学装置以及国防军事、航空航天、船舶工业等领域的发展，大尺寸位置与形貌测量需求凸显，对其核心关键技术——大尺寸高精度绝对距离测量提出了更高要求：测量范围和测量尺寸从几米到几十米甚至上百米，测量精度从几微米到几百微米量级，测量目标迥异，测量环境复杂严苛。本项目主要针对现有方法难以满足复杂工况下高精度动态非合作目标测量需求以及系统复杂等问题，提出了一种基于运动相位光频同步补偿的动态扫频干涉绝对距离测量方法，主要围绕扫频干涉测量动态误差光频同步补偿、运动相位光频同步测量提取与校准、测量基准标定与色散失配补偿三个方面展开研究。其中，在扫频干涉测量动态误差光频同步补偿方面，研究扫频干涉测量动态误差分离与补偿机理，重点研究基于运动相位光频同步补偿的动态扫频干涉测量方法，解决了动态目标扫频干涉测量中多普勒效应恶化测量精度的问题；在运动相位同步测量提取与校准方面，研究光频同步运动相位误差形成机理，重点研究了光频同步运动相位高精度提取方法与运动相位光频偏差校准方法，抑制了运动相位提取时光频偏差对测量精度的影响，实现了运动相位校准后精确补偿；在测量基准标定与色散失配补偿方面，研究扫频干涉测量基准标定影响与色散失配误差作用机理，重点研究基于气体吸收谱的测量基准在线标定与大扫频范围色散失配误差补偿方法，提升了测量精度与稳定性。在上述研究基础上，形成了具有非合作目标测量能力的百米测量范围内百微米级测量精度的动态扫频干涉精密测距方法与装置，同时进一步研制了三维测量原理样机并开展了实验验证，本项目将为大型装备制造和大科学工程所需大尺寸绝对距离动态精密测量提供有效解决途径和精密测量仪器。