新型太赫兹微测辐射热计天线多参数耦合机理及阵列探测器基础研究

This project is focused on the shortcomings of traditional terahertz (THz) microbolometers in detection mechanism, structure design and device fabrication. A new scheme of antenna coupled THz microbolometer is proposed with high absorption, fast response, high integration and simplified process. This project is scheduled to do the following innovative works: (1) analyzing the action mechanisms between antenna, micro-bridge structure and THz wave, and building a coupling model of electrical, magnetic, thermal and mechanical parameters by combining electromagnetic analysis of antenna and thermal analysis of microbolometer. (2) designing novel antenna in THz microbolometer acting as both light absorbing layer and electrode lead layer, and analyzing its electromagnetic coupling absorption.mechanism, modulation mechanism of THz wave absorption, and influences on electrical signal transmission and mechanical support of micro-bridge structure. (3) optimizing the micro-bridge structure, designing the fabrication process and breaking through the key technology of integration of the antenna and electrode lead layer, and achieving THz detection unit and 80 × 60 array devices with high.absorption rate, low response time and low noise equivalent power. The implementation of this project will complete the improvement of theoretical model, the design of new detection structure, and the fabrication of unit and array devices. This work could lay good theoretical and technical foundations for the development of THz detection and imaging devices with high performances.

本项目针对现有太赫兹微测辐射热计在探测机理、结构设计、器件研制等方面的问题，提出一种高吸收、快响应、高集成、工艺简化的天线耦合太赫兹微测辐射热计新方案，主要开展如下创新研究：（1）分析太赫兹波与天线、微桥结构的作用机理，重点结合天线电磁分析与微测辐射热计热分析，构建出天线耦合太赫兹微测辐射热计电、磁、热、力多参数耦合机理模型；（2）设计新型微测辐射热计天线，同时用作光吸收层与电极引线层，剖析新型天线的电磁耦合吸收机理，对太赫兹波吸收的调制机制，以及对微桥力学支撑与电信号传输的影响；（3）通过微桥结构优化与制备工艺设计，突破天线与电极引线层一体化集成制备技术，实现高吸收率、低响应时间、低噪声等效功率的太赫兹探测单元与80×60阵列器件的制备。通过本项目的实施，完成理论模型完善、新型探测结构设计、单元及阵列器件研制，为高性能、阵列化的太赫兹波探测成像器件的研制奠定良好的理论与技术基础。

本项目针对现有太赫兹微测辐射热计在探测机理、结构设计、器件研制等方面的问题，开展新型太赫兹微测辐射热计天线多参数耦合机理与阵列探测器基础研究，构建出较完善的天线耦合微桥结构探测太赫兹波理论模型，获得高吸收、快响应太赫兹探测单元与阵列器件。通过本项目的开展，在探测机理方面，项目组分析了太赫兹波与天线、微桥结构的作用机理，研究了吸波结构对太赫兹波电磁吸收率与吸收带宽的调制机制，重点结合天线电磁分析和微桥热分析，建立微桥探测结构电、磁、热、力多参数耦合理论模型；在结构设计方面，项目组在微桥结构中设计并集成了圆盘天线、开口谐振环、螺旋天线等多种天线吸波结构，以改善太赫兹微测辐射热计的吸收率与吸收带宽，对设计的多种吸波结构进行制备与太赫兹吸收特性测试，验证理论计算结果并对结构参数进行优化；在器件研制方面，完成微桥结构工艺路线与工艺兼容性设计，实现太赫兹探测阵列集成制造，阵列规模达到384×288，在2.52THz处的太赫兹波吸收率接近90%，探测阵列噪声等效功率（NEP）优于10pW/Hz1/2，响应时间小于20ms，实现高吸收、快响应太赫兹探测单元与阵列器件。通过本项目的实施，完成理论模型完善、新型探测结构设计、单元及阵列器件研制，为高性能、阵列化的太赫兹波探测成像器件的研制奠定良好的理论与技术基础。