微结构硅基等离子体通道及其电磁波调控特性研究

Micro-structured plasma antennas have many incomparable advantages, which make it became the hot spot in worldwide research. This project proposes a new antenna idea by using the micro-structured surface PIN diodes as pixel units to constitute the silicon based plasma antenna screen, and using integrated circuit systems to control the plasma parameters and the on-off state of the pixel units, thus realizing in forming antennas of various functions flexibly, fast and intelligently. Two key physical issues of the formation mechanism of silicon based plasma channel and its electromagnetic wave control characteristic will be studied in detail and deeply. We will set up the theoretical calculation model of plasma parameters (permittivity and permeability) based on micro-structured silicon; develope the calculation methods of the coupled transmission of electromagnetic waves in the non-uniformed plasma channel and micro-structured silicon; and study the fabricating methods of surface-PIN diode and measuring methods of plasma parameters. These research works will provide exact physical parameters, reliable simulation technology and measuring methods for the study of the new micro-structured silicon based plasma antenna. This project involves plasma physics, semiconductor physics, electromagnetic theory etc. That has an important role in promoting the antenna technology to the integration, intelligence, automation and multi-functional development direction.

微结构等离子体天线有很多传统天线无可比拟的优点，是近年来国际研究的热点。本项目提出利用微结构表面PIN二极管作为天线像素单元构成硅基等离子体天线屏，通过集成电路控制离子体参数和像素的开关实现在天线屏上灵活、快速地构筑各种功能天线的新思想；对新型微结构天线中"硅基等离子体通道的形成机理及其电磁波调控特性"两个关键物理问题进行深入细致的理论研究，建立微结构硅基等离子体参数（介电系数和磁导率）的理论计算模型；发展出电磁波在微结构硅基非均匀等离子通道中耦合传输的计算方法；并基于微纳加工技术开展微结构PIN制作及等离子体参数实验测量方法研究，为基于微结构等离子体天线的研究提供准确的物理参数、可靠的仿真技术和实验测量方法。本项目的研究涉及等离子体物理、半导体物理、电磁场理论等多学科的深层次交叉融合，对发展集成化、智能化、自动化和多功能化的天线具有重要的推动作用。

提出了利用微结构表面PIN二极管作为天线像素单元构成硅基等离子体天线屏，通过集成电路控制像素的开关和等离子体参数实现在天线屏上灵活、快速地构筑各种功能天线的新思想。本项目针对这种新型微结构天线首先要解决的两个关键物理问题：1硅基等离子体通道的形成机理；2微结构等离子体通道的电磁波调控特性，进行了深入的理论研究。建立了微结构硅基等离子体参数（介电系数和磁导率）的理论计算模型；发展出了电磁波在微结构PIN阵列中耦合传输的计算方法，为基于微结构阵列天线的设计提供可靠的仿真技术；通过集成电路工艺，设计并加工了多种表面PIN样片及驱动控制电路板，对硅基等离子体通道的电磁波调控特性进行了实验研究，初步验证了其作为可重构天线的有效性。