自由空间光通信精跟踪系统高频响应硅基反铁电厚膜微振镜基础研究

Utlizing the strong field-induced strain and the sharp phase switching of antiferroelectric materials, realizing the compatible manufacturing technology of the functional materials and front micro-nano manufacturing, and proposing the design method of fine pointing device with the integrated function of drive and light reflection in space optical communication system, it produces a new way to exploit fine pointing device of ATP system with high reliability, strong sensitivity and good anti-counterfeiting. In view of the application combination of both material science and MEMS optical devices, the design of buffer layers lattice matching and the method of interfacial stress relief by multi-step annealing are proposed firstly; large area of (Pb,La)(Zr,Ti)O3(PLZT) anti-ferroelectric thick films is fabricated on silicon substrate by heterogeneous integrated manufacturing secondly; the micro-vibrating mirror based on anti-ferroelectric thick films with excellent fatigue characteristic, rapid response speed and large strain capacity will be obtained by the key technology of micro-nano compatible manufacturing thirdly; the phase transformation rules and strain behaviors of anti-ferroelectric thick films micro-vibrating mirror will be revealed under the electric field and the field-induced strain dynamics model of anti-ferroelectric thick film micro-vibrating mirror will be established. Finally, this project will provide the academic guidance and the key micro-components for the design and development of exploiting fine pointing device of ATP system with microminiature, high reliability, strong sensitivity and ultra-precision positioning in the field of space optical communication.

利用硅基反铁电材料的相变应变效应和快速开关特性，实现反铁电功能材料与前沿微纳制造技术的兼容制造，提出空间光通信系统精瞄器件集驱动/光反射功能一体化设计，为高可靠、高灵敏、防伪抗干扰性强ATP精瞄器件开发提供新的思路。项目拟从材料科学与光器件应用相衔接的角度出发，提出缓冲层晶格匹配设计和多步退火界面应力释放方法，实现大面积(Pb,La)(Zr,Ti)O3(PLZT)硅微反铁电功能厚膜异质集成制造；结合微纳兼容制造关键技术，研制具有优异疲劳特性、快响应速度、大应变量的PLZT反铁电厚膜微振镜，揭示PLZT反铁电厚膜微振镜在电场作用下的结构相变调控规律及相应的相变应变效应影响机制，建立PLZT反铁电厚膜微振镜作为微驱动执行构件的电场致动力学模型，为微小型、高灵敏、高可靠性、超精密定位空间光通信系统ATP精瞄器件的设计和开发提供理论依据和核心构件支持。

快速、精确的捕获、跟踪和瞄准（ATP）是保证空间远距离光通信的前提, 是空间光通信系统中最为关键的核心，同时是最难解决的一项技术。硅基反铁电微振镜具有高响应速度、低驱动电压、相变前近线性特性和控制精度高等优点，是空间光通信ATP精跟踪系统核心器件。.本项目研究基于硅基反铁电材料相变应变效应和快速开关特性，实现反铁电功能材料与前沿微纳制造技术的兼容制造，提出空间光通信系统精瞄器件集驱动/光反射功能一体化设计，为高精度、高灵敏、防伪抗干扰性强ATP精瞄器件开发提供新的思路。.项目从材料科学与MEMS光器件应用相衔接的角度出发，实现大面积(Pb, La)(Zr, Ti)O3 (PLZT) 硅微反铁电功能厚膜异质集成制造；结合微纳兼容制造关键技术，研制具有小尺寸、响应速度快、迟滞小和控制精度高的PLZT反铁电厚膜微镜驱动构件，揭示其在电场作用下的结构相变调控规律及相应的相变应变效应影响机制；并对控制精度成功验证。采用溶胶-凝胶工艺诱导生长与硅衬底晶格高度匹配的(100)择优取向铅基反铁电功能介质厚膜(3μm)，实现大面积均匀致密(表面粗糙度＜3nm)功能介质厚膜的晶圆级异质集；揭示在电场作用下的相变调控规律及其相变行为特性和场致应变效应。通过硅微MEMS加工技术，解决了基于功能转换介质厚膜的硅微基础结构异质兼容制造出体积小、响应时间短、控制精度高的PLZT反铁电厚膜微镜构件。对基于PLZT反铁电厚膜的微镜驱动构件响应执行能力进行了测试并验证了其反铁电开关特性；最后获得了其动态响应特性参数：速率范围0.97~3.53 m/s，偏转角范围 10100~50769 µrad。以上结果表明，基于PID反馈控制与Preisach逆补偿的前馈相结合的复合控制具有线性度更好的输入输出关系，能够更好的满足PLZT微镜的精跟踪控制要求。从理论和实现角度均验证了光束偏转微驱动构件具备微型化(μm3级)、响应速度快(百纳秒级)、功耗低(十伏级)和控制精度高(μrad级)等高性能指标。