纳米晶金刚石薄膜场发射阵列阴极研究

Diamond has recently been considered as one of the most appropriate and promising cool-cathode materials for field-emission displays. In this article, a novel focusing structure of field-emission arrays made of a parallel planer, gate, and in-plane lens is suggested. Using the particle-in-cell simulation code MAGIC, this structure has been simulated. The electron-beam streamlines and the x-py phase show that the in-plane lens focuses the electron beam. This structure can be used as a moderated field-emission cathode to emit a collimated electron beam, such as in field-emission displays. Polycrystalline diamond films were grown on copper silicon, molybdenum substrates by microwave plasma chemical vapor deposition (MPCVD); we have found that diamond/Cu has the best emission characteristics among these materials. The current density of the film can be 1~100mA/cm2 at the field strength of 2.0~3.5MV/m. When emission electrons bombarded fluorescent screen, fairly bright spots could be observed. The nano-crystalline dianmond and nanotube has been grown on silicon by MPCVD too.

研究在未经打磨的衬底上沉积纳米晶金刚石薄膜的方法，结合选择性生长技术和牺牲层技术探索制备表面极为平整，晶粒粒径为数十纳米、边界清晰的阵列图形。探索图形间的较高电压下的电隔离技术。由此制备可矩阵选址的场发射阵列阴极，该研究为金刚石薄膜场发射平面显示器的研制打下基础。其图形化技术还可用于金刚石微电子器件和微机械等领域。